Fine Ceramics

Aluminium Nitride

The highlight of Aluminium nitride ceramics’ property is high heat conductance. Also the material has other unique properties which are high florin plasma resistance and similar expantion coefficient with Silicon (Si). With these benefits, the Aluminium Nitride ceramics is used in many different applications which are required high heat conductivity and/or high plasma resistance such as the parts used in semiconductor equipments We provide both high heat conductance grade and high purity grade of the aluminium nitride ceramics.


  • ・Chamber parts for Semiconductor Process Equipment
  • ・Heat Radiation Substrate

Characteristics table