Ferrofluidic Seals

Magnetic Fluid Seal

Ferrofluidic Seals (FerroSeals)

Multi-Axial FerroSeals

Purge Mode Type

Model SFV020WC type
Reference Ultimate Pressure [Pa] 10-6
Operating Temperature Range [℃] Room temperature to 80
Gas Compatibility Reactive gas
Housing Material SUS304
Shaft Material SUS630
This model has a gas purging mechanism built into the sealed unit to prevent process gases from leaking into the sealed part and reduce the amount of deposits generated near the sealed part, achieving a longer life.
CVD systems and furnaces generating corrosive gases and deposits
Values in the data tables are the result of our test ,
or calculation and not guaranteed