Ferrofluidic Seals

Magnetic Fluid Seal

Ferrofluidic Seals (FerroSeals)

Multi-Axial FerroSeals

Three Coaxial Type

Model CFL200NN type
Reference Ultimate Pressure [Pa] 10-6
Operating Temperature Range [℃] Room temperature to 80
Gas Compatibility Inert gas
Housing Material A2024
Shaft Material SUS630
This model has a high stiffness and achieves high run-out accuracy and rotation accuracy.
Aluminum housing types are also available for weight saving.
LCD large glass substrate transfer vacuum robots (frog-arm type)
Values in the data tables are the result of our test ,
or calculation and not guaranteed