Ferrofluidic Seals

Magnetic Fluid Seal

Ferrofluidic Seals (FerroSeals)

Multi-Axial FerroSeals

Two Coaxial Type

Model CFF012NN type
Vacuum Pressure [Pa] 10-6
Operating Temperature Range [℃] Room temperature to 80
Gas Compatibility Reactive gas
Housing Material SUS304
Shaft Material SUS630
This model is lightweight and compact and achieves high run-out accuracy and rotation accuracy.
Wafer transfer vacuum robots (scalar type)
Values in the data tables are the result of our test ,or
calculation and not guaranteed