Ferrofluidic Seals
(FerroSeals)

Magnetic Fluid Seal

Ferrofluidic Seals (FerroSeals)

Multi-Axial FerroSeals

Three Coaxial and Linear Type

Model CFF022NN type
Reference Ultimate Pressure [Pa] 10-6
Operating Temperature Range [℃] Room temperature to 80
Gas Compatibility Reactive gas
Housing Material SUS304
Shaft Material SUS630
Bellows Stroke 50mm
Bellows Cycle Life 106 or more
[Features]
This model has a high stiffness and achieves high run-out accuracy and rotation accuracy with a co-axial/tri-axial structure.
It allows for linear motion with 50mm strokes, making it best suited to cluster tools.
[Applications]
300mm wafer transfer or LCD large glass substrate transfer vacuum robots
Values in the data tables are the result of our test ,
or calculation and not guaranteed