- Company
- Semiconductor Equipment RelatedThermo-electric Modules
- Automotive Related
- Semiconductor Equipment RelatedFerrofluidic Seals (FerroSeals)
- Semiconductor Equipment RelatedFine Ceramics Components
- Semiconductor Equipment RelatedMachinable Ceramics Components
- Semiconductor Equipment RelatedEB Components
- Electronic Device RelatedFerrofluid
- Electronic Device RelatedThermistors
- Electronic Device RelatedChillers
Chillers
Low temperature compression series chiller
FCCW0362303-20
Model introduction
This device adopts a frequency conversion temperature control method to improve energy efficiency and reduce energy consumption. The target cooling capacity can reach 3600W at -20 ℃. The device can meet the cooling needs of users. It has accurate temperature control technology and can be widely used from -20 ℃ to 80 ℃. The temperature is lapped with 0.1 ℃ tolerance.
Applications
Widely used in etching equipment of semiconductor industry, CMP(Mechanical Polishing), laboratory precision equipment, high precision testing instruments, cosmetic medicine equipment, solid state laser, mold, etc.
Technical parameters
| Model | FCCW0362303-20 | ||
| Cooling method | Vapor compression refrigeration | ||
| Radiating Method | Forced water-cooling | ||
| Control Method | Cooling/Heating PID control | ||
| Ambient Temperature/Humidity | 5~40℃, 30~70%RH | ||
| Refrigerant | R410A | ||
| Power Supply | Three-phase AC208V，50/60 Hz | ||
| Product Size | 390*650*1265mm | ||
| Circulatory System |
Circulating Fluid | DI water/Ethylene glycol/Fluoride solution | |
| Operating Temperature Range | -20.0~80.0℃ | ||
| Cooling Capacity | ≈3600W（-20℃） | ||
| Heating Capacity | ≈3000W | ||
| Temperature Stability | ±0.1℃ | ||
| Pump | Centrifugal pump 40L/min, 30m lift | ||
| Tank Capacity | Approx 15L | ||