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(Cold plate system and TEC controller)

FCSW0052305

Model introduction

This device is a 6-inch wafer cooling system with built-in TEC modules. The cooling temperatures of surface are lapped with 0.05 ℃ tolerance. Compared to a pure embedded cold plate, the cooling capacity is more reliable and stable, and the plate surface temperature is more uniform. The device can meet customized needs with a shorter time.

Applications

Widely used in the semiconductor industry as a process adhesive developing device. The device can provide fast cooling for wafers.

Technical parameters

Model FCSW0052305
Wafer Size 6-inch
Cooling method Thermoelectric modules
Radiating Method Forced water-cooling
Control Method Cooling/Heating PID control
Ambient Temperature/Humidity 10～35℃, 35～80%RH
Hot Surface Circulating Fluid Factory cooling water
Operating Temperature Range 15.0~35.0℃
Cooling Capacity 120W（25℃）
Heating Capacity 270W（25℃）
Temperature Stability ±0.05℃
Temperature Controller Model FCSE0004820
Control Voltage DC12~48V
Factory
cooling
water		 Temperature Range 15~30℃
Pressure Range ≤1MPa
Required Flow Rate 2~5L/min
Wetted Parts Material Stainless Steel 304
Actual Input Power ≤150W
Maximum Output Current 18A
Protection Function Overload, short circuit, over-temperature
Communications RS485
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