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SiFusion Furnaceware

Pure poly silicon solutions
for LPCVD, High-Temperature
and other furnace processes

SiFusion, a division of Ferrotec's material solutions business, offers SiFusion pure poly silicon furnaceware — a breakthrough solution for front-end thermal processes. SiFusion uses patented technology manufacture of furnace-ware products from ultrapure poly silicon material.

Some examples of the SiFusion poly silicon furnaceware products that Ferrotec manufactures include:

  • Boats
  • Injectors
  • Liners
  • Pedestals
  • Ring Boats
  • Shelf boats