SiFusion, a division of Ferrotec's material solutions business, offers SiFusion pure poly silicon furnaceware — a breakthrough solution for front-end thermal processes. SiFusion uses patented technology manufacture of furnace-ware products from ultrapure poly silicon material.
Some examples of the SiFusion poly silicon furnaceware products that Ferrotec manufactures include:
|SiFusion Polysilicon Boat||SiFusion Polysilicon Injector||SiFusion Polysilicon Liner|
|SiFusion Polysilicon Pedestal||SiFusion Polysilicon Ring Boat||SiFusion Polysilicon Shelf Boat|
Low Pressure Chemical Vapor Deposition (LPCVD) processes, including silicon nitride and polysilicon, are important steps in wafer manufacturing, using the high diffusivity of gasses to create a uniform deposition thickness.
Typical SiFusion product life in LPCVD silicon nitride applications is more than 250 microns of cumulative deposition with no routine cleaning.
SiFusion components, made from pure poly silicon, significantly reduce fixture-generated particulates, a key concern in LPCVD processes. As deposition film thickness on furnace fixtures increases, thermal stress between the films and quartz or silicon carbide furnace fixtures results in the film’s fracturing, which in turn results in flaking. The resulting particle generation severely affects yield.
In LPCVD applications, SiFusion products deliver low particles without costly routine cleaning or associated hazardous wastes.