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Silicon Nitride Si3N4

Silicon Nitride Ceramics offer high thermal, shock, and impact resistance. With it's exceptional thermal and shock resistance properties, combined with it's high strength, Silicon Nitride is a leading choice for high-temperature, high-load applications.

Applications

  • Semiconductor Process Equipment
  • General Industrial Machinery
  • Heat resistance parts

Silicon Nitride Ceramics

Properties

       
General Properties Main Component Purity (wt%) 90
Color Gray
Density (g/cm3) 3.25
Water Absorption (%) 0
Mechanical Properties Bending Strength (MPa) 785
Young's Modulus (GPa) 285
Vickers Hardness (GPa) 16
Thermal Properties Max.Operating Temperature (°C) 1200
Coefficient of Thermal Expansion (1/°C×10-6) RT~500°C 3.5
RT~800°C 4.2
Coefficient of Thermal Conductivity (W/m×K) 13
Thermal Shock Resistance ΔT (°C) 650
Electrical Properties Volume Resistivity 25°C 1016
300°C 1014
500°C 1011
800°C 107
Dielectric Constant 10GHz 8.3
Dielectric Loss (×10-4) 25
Q Factor (×104) 0.04
Dielectric Breakdown Voltage (KV/mm) 14