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Low CTE Ceramics

Low CTE Ceramics exhibit zero expansion at room temperature. These light weight ceramics are a good choice for applications like e-chucks and high-precision instruments where dimensional stability is critical.

Applications

  • Semiconductor Process Equipment Parts
  • Precision Machinery Parts

Low CTE Ceramics Products Photo

Properties

       
General Properties Main Component Purity (wt%) -
Color Gray
Density (g/cm3) 2.5
Water Absorption (%) 0
Mechanical Properties Bending Strength (MPa) 200
Young's Modulus (GPa) 140
Vickers Hardness (GPa) -
Thermal Properties Max.Operating Temperature (°C) -
Coefficient of Thermal Expansion (1/°C×10-6) RT~500°C <0.5
RT~800°C 2.0
Coefficient of Thermal Conductivity (W/m×K) -
Thermal Shock Resistance ΔT (°C) -
Electrical Properties Volume Resistivity 25°C 1014
300°C 1012
500°C 1010
800°C 106
Dielectric Constant 10GHz -
Dielectric Loss (×10-4) -
Q Factor (×104) -
Dielectric Breakdown Voltage (KV/mm) 23