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Alumina Ceramics Al2O3

Alumina ceramics are one of the most robust ceramics available. Alumina ceramics have outstanding properties that make them one of the most widely used ceramics for structural, wear, and corrosive environments. Additionally, with their exceptional electrical properities, high purity alumina ceramics are one of the preferred materials for semiconductor chamber applications.

Applications

  • Chamber Parts in Semiconductor Equipment
  • Wafer Transfer Parts
  • FPD Manufacturing Equipment Parts
  • Heat Resistant and Electrical Insulation Parts
Ceramics wafer transfer
Ceramics electrical insulation

Properties

      AS999 AG999 AM997
General Properties Characteristics High Purity Plasma-resistant General grade
Main Component Purity (wt%) 99.99 99.9 99.7
Color White Whitish-yellow Whitish-yellow
Density (g/cm3) 3.95 3.93 3.93
Water Absorption (%) 0 0 0
Mechanical Properties Bending Strength (MPa) 390 390 390
Young's Modulus (GPa) 380 380 375
Vickers Hardness (GPa) 18 17 18
Thermal Properties Max.Operating Temperature (°C) 1600 1600 1600
Coefficient of Thermal Expansion (1/°C×10-6) RT~500°C 7 7.4 7
RT~800°C 7.7 8.1 7.6
Coefficient of Thermal Conductivity (W/m×K) 33 30 33
Thermal Shock Resistance ΔT (°C) 200 - 200
Electrical Properties Volume Resistivity 25°C 1015 1015 1016
300°C 1012 - 1013
500°C 109 - 1010
800°C 107 - 109
Dielectric Constant 10GHz 9.9 9.7 9.7
Dielectric Loss (×10-4) 0.5 6 1
Q Factor (×104) 2 0.2 1
Dielectric Breakdown Voltage (KV/mm) 18 17 18